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Myplas PECVD
plasma enhanced CVD system
Plasma: capacitive coupled plasma (CCP)
Plasma chamber: 180 mm x 180 mm x 300 mm (W x H x D)
Plasma power: 300W
Gas lines: 3 (with MFC’s)
Plasma chamber: 180 mm x 180 mm x 210 mm (W x H x D)
Unit dimensions: 400 mm x 520 mm x 730 mm (W x H x D)
Unit weight: approx. 80 kg (without pump)
Control system: PLC control with PC user interface
Power connection: 230V / 16A
Myplas ALD
thermal ALD system
Substrate temperature: ambient to 400°C
Precursor lines: 2 (ambient to 200°C)
Gas lines: 4 (3 with MFC’s, 1 pulse controlled)
Reaction chamber: 102 mm x 10 mm x 110 mm (W x H x D)
Vacuum chamber: 180 mm x 180 mm x 300 mm (W x H x D)
Unit dimensions: 650 mm x 520 mm x 730 mm (W x H x D)
Unit weight: approx. 100 kg (without pump)
Control system: PLC control with PC user interface
Power connection: 230V / 16A
Options: additional gas and precursor lines
Myplas PEALD
plasma enhanced and thermal ALD system
Plasma: capacitive coupled plasma (remote mode)
Plasma power: 300W
Substrate temperature: ambient to 400°C
Precursor lines: 2 (ambient to 200°C)
Gas lines: 4 (3 with MFC’s, 1 pulse controlled)
Reaction chamber: 102 mm x 10 mm x 110 mm (W x H x D)
Vacuum chamber: 180 mm x 180 mm x 300 mm (W x H x D)
Unit dimensions: 650 mm x 520 mm x 730 mm (W x H x D)
Unit weight: approx. 120 kg (without pump)
Control system: PLC control with PC user interface
Power connection: 230V / 16A
Options: additional gas and precursor lines
Myplas PEALD 3D
plasma enhanced ALD 3D batch system
Plasma: inductive coupled ECR plasma
Plasma power: 600W
Substrate temperature: ambient / plasma regulated
Precursor lines: 2 (ambient to 200°C)
Gas lines: 2
Plasma chamber: 180 mm x 180 mm x 210 mm (W x H x D)
Unit dimensions: 650 mm x 750 mm x 800 mm (W x H x D)
Unit weight: approx. 160 kg (without pump)
Control system: PLC control with PC user interface
Power connection: 400V / 16A
Options: additional gas and precursor lines
PLASMA ELECTRONIC GmbH  · Otto-Lilienthal-Str. 2 · 79395 Neuenburg · Germany
phone: +49 7631 7017 -0 · fax: +49 7631 7017 -20 · infomyplas.de
myplas
PECVD system
myplas
ALD / PEALD system
O2 Plasma
in PEALD mode
myplas
PEALD 3D system

Impressum:

PLASMA ELECTRONIC GmbH

Otto-Lilienthal-Str. 2
D - 79395 Neuenburg
GERMANY

Phone: +49 7631 7017 - 0
Fax: +49 7631 7017 - 20

E-Mail: infomyplas.de
Internet: www.myplas.de

Sitz: D 79395 NEUENBURG, HRB 300596
USt-IdNr.: DE 811 672 076

Geschäftsführer: Dr. Armin Mohr

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